| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a measuring device and a measuring method capable of highly accurately measuring a characteristic value of a sample with a single- or multi-layered structure.SOLUTION: A measuring device includes: means by which a second time waveform is acquired by detecting a terahertz wave reflected by a sample using a detection unit when an irradiation unit irradiates the sample with the terahertz wave; means for setting an initial value of each of parameters indicating characteristic values of respective layers composing the sample, and for estimating a time waveform of each of reflection waves which are generated at respective interfaces of the sample, from the initial value of each of the parameters using a first time waveform; and means for searching for a characteristic value of the sample by sequentially changing the parameters from the respective initial values until an error between the second time waveform and a time waveform acquired by synthesizing the estimated time waveforms of the respective reflection waves becomes less than a predetermined value.</p> |
