FORCE RESPONSIVE INDUCTORS FOR FORCE SENSORS

摘要

In some examples, a sensor comprises a circuit including an inductor. The inductor comprises an inductor layer, a reference layer comprising at least one of an electrically conductive material or a magnetic material, and a variable layer formed between the reference layer and inductor layer. A thickness of the variable layer may be configured to change upon application of a force external to the variable layer thereby causing a change in position of the reference layer relative the inductor layer, and the change in position of the reference layer relative the inductor layer changes an inductance of the inductor. The sensor may be configured to detect the force based on the change in inductance of the inductor.