| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holding tool with improved long-term reliability of contact between a pin and an electrode.SOLUTION: A sample holding tool 10 includes: a base substance 1 made of a ceramic and having a sample holding surface 11 on an outer surface; and a first electrode 2 provided in the base substance 1. The base substance 1 has a hole part 12 which opens on the outer surface and uses the first electrode 2 as at least a part of its bottom part. The base substance 1 further includes a second electrode 3 provided on the first electrode 2 in the hole part 12. The structure allows the electrodes to be thickened in a portion to which an external terminal connection pin 5 is pressed. |
