发明名称 |
SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To save an etching process for forming a trench of a contact part.SOLUTION: When forming a p-type impurity layer 3 in a semiconductor device manufacturing method, a dent is made to be left at a central part of a portion formed in a recess 2a of the p-type impurity layer 3. And the dent serves as a contact trench 3c. This saves etching for forming the contact trench 3c to avoid an increase in manufacturing processes. |
申请公布号 |
JP2015159271(A) |
申请公布日期 |
2015.09.03 |
申请号 |
JP20140246956 |
申请日期 |
2014.12.05 |
申请人 |
DENSO CORP;TOYOTA MOTOR CORP |
发明人 |
SAKAKIBARA JUN;AKAGI NOZOMI;MIZUNO SHOJI;TAKEUCHI YUICHI;SUZUKI KATSUMI |
分类号 |
H01L29/78;H01L21/20;H01L21/265;H01L21/336;H01L29/06;H01L29/12 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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