发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To save an etching process for forming a trench of a contact part.SOLUTION: When forming a p-type impurity layer 3 in a semiconductor device manufacturing method, a dent is made to be left at a central part of a portion formed in a recess 2a of the p-type impurity layer 3. And the dent serves as a contact trench 3c. This saves etching for forming the contact trench 3c to avoid an increase in manufacturing processes.
申请公布号 JP2015159271(A) 申请公布日期 2015.09.03
申请号 JP20140246956 申请日期 2014.12.05
申请人 DENSO CORP;TOYOTA MOTOR CORP 发明人 SAKAKIBARA JUN;AKAGI NOZOMI;MIZUNO SHOJI;TAKEUCHI YUICHI;SUZUKI KATSUMI
分类号 H01L29/78;H01L21/20;H01L21/265;H01L21/336;H01L29/06;H01L29/12 主分类号 H01L29/78
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