发明名称 |
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, MASK BLANK HAVING ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide an actinic ray-sensitive or radiation-sensitive resin composition from which a fine pattern with a small space width (for example, a line width of 50 nm or less) can be formed with high resolution while suppressing variations in a line width of a pattern depending on a PEB temperature, an actinic ray-sensitive or radiation-sensitive film using the composition, a mask blank including the film, a pattern forming method, a method for manufacturing an electronic device, and an electronic device.SOLUTION: The actinic ray-sensitive or radiation-sensitive resin composition comprises a resin (A) containing a repeating unit represented by general formula (4), and a crosslinking agent (C) containing a polar group. The crosslinking agent (C) is a compound represented by general formula (1), or a compound in which 2 to 5 structures represented by general formula (1) are connected by a connecting group represented by Lin general formula (3) or by a single bond. |
申请公布号 |
JP2015158546(A) |
申请公布日期 |
2015.09.03 |
申请号 |
JP20140032312 |
申请日期 |
2014.02.21 |
申请人 |
FUJIFILM CORP |
发明人 |
YOKOGAWA NATSUMI;YAMAGUCHI SHUHEI;TAKAHASHI KOTARO |
分类号 |
G03F7/004;C08F8/00;C08F12/24;C08F20/26;G03F7/038;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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