| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem in which, in a state of a wafer before making a piezoelectric transducer into pieces, an accurate measurement of an oscillatory frequency may not be made due to a frequency interference from neighboring elements when a plurality of elements are simultaneously oscillated. ! SOLUTION: In a process of forming an electrode pattern by using photo lithography on a wafer composed of a piezo-electric material on which a plurality of piezoelectric transducers are formed, a frame side face of the wafer is exposed to pattern the electrode by tilting a light source so that illumination light for exposing a photoresist obliquely hits the wafer. ! COPYRIGHT: (C)2015,JPO&INPIT |
