MICROELECTROMECHANICAL STRUCTURE WITH FRAMES

摘要

A robust microelectromechanical structure that is less prone to internal or external electrical disturbances. The structure comprises a mobile element with a rotor suspended to a support, a first frame anchored to the support and circumscribing the mobile element, and a second frame anchored to the support and circumscribing the mobile element between the mobile element and the first frame, electrically isolated from the first frame. The rotor and the second frame are galvanically coupled to have a same electric potential.