| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable a mask for exposure to be stably grounded. <P>SOLUTION: A reticle pod 20 that houses a reticle R includes an inner pod 41 capable of housing the reticle R, an outer pod 39 capable of housing the inner pod 41, a conductive and movable contact part 132A provided in the inner pod 41 and capable of contacting with a ground region 8A of the reticle R, and a flat spring 154 which conductively connects a base plate 53 as a contact part of the inner pod 41 with the outer pod 39 to the contact part 132A. <P>COPYRIGHT: (C)2013,JPO&INPIT |
