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发明名称
Apparatus for seperating dregs from wafer using centrifugal force
摘要
<p>웨이퍼 조각들과 섞여 있는 이물질을 상기 웨이퍼 조각들로부터 분리하기 위한 웨이퍼의 이물질 분리장치는, 상기 이물질과 웨이퍼 조각들이 수용되며, 상기 이물질과 웨이퍼 조각들이 잠기는 높이로 세정액이 투입되는 분리 배스(bath)와, 상기 분리 배스 내에 수용된 세정액을 교반하는 교반 장치와, 상기 교반 장치의 교반에 따른 상기 세정액의 유동에 의해 부유하는 이물질을 포집하는 포집 장치를 포함한다.</p>
申请公布号
KR101549464(B1)
申请公布日期
2015.09.02
申请号
KR20130119750
申请日期
2013.10.08
申请人
发明人
分类号
H01L21/02;H01L21/302
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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