| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to reduce the size of a substrate production line 100 that accommodates a substrate 10 carried out from a substrate processing device 1, into a housing container 210.SOLUTION: While pushed out by a pusher 43 provided in the substrate inspecting device 1, an inspected substrate 10 is carried out of the device. Therefore, by arranging a housing rack 210 on the carrying-out side of the substrate inspecting device 1, a substrate 10 carried out from the substrate inspecting device 1 can be pushed into the housing rack 210 as it is by the pusher 43, and the substrate 10 can be accommodated in the housing rack 210 without requiring an unloader equipped with a conveyor 31. Accordingly, forming a substrate production line 100 from such a substrate inspection device 1 makes it possible to reduce the size of the substrate production line 100 that accommodates a substrate 10 carried out from the substrate inspection device 1, into the housing rack 210.</p> |
