| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition having good sensitivity, having high surface hardness and solvent resistance as well as excellent flatness (residual film rate), and to provide an interlayer insulating film for a display element and a method for forming the film, which is obtained from the above composition and does not induce display failure. <P>SOLUTION: The radiation-sensitive resin composition contains [A] a polymer having a structural unit (I) expressed by formula (1) and [B] a radiation-sensitive acid generator. In formula (1), R<SP POS="POST">3</SP>represents a single bond, a methylene group, an alkylene group, an arylene group, a group expressed by formula (4), or a divalent organic group comprising a combination of these groups. <P>COPYRIGHT: (C)2013,JPO&INPIT |
