PREPARING METHOD FOR ORGANIC LIGHT EMITTING DISPLAY DEVICE

摘要

The present invention relates to a method for manufacturing an organic light emitting display device including the following steps: a) forming a gate electrode on a substrate; b) forming a gate insulating film on the substrate with the gate electrode; c) forming an activating layer on the gate insulating film; d) forming an insulating layer on the activating layer; e) forming a source and a drain electrode in contact with the activating layer on the insulating layer; f) forming a passivation layer to cover the source and the drain electrodes on the insulating film; and g) forming an organic light emitting device electrically connected to either the source electrode or the drain electrode. The step a) includes a step of forming aluminum-based, molybdenum-based, silver-based metal films or a laminated film thereof and forming the gate electrode by etching the metal films with the composition of an etchant including 50-70 wt% of phosphoric acid, 2-15 wt% of nitric acid, 5-20 wt% of acetic acid, 0.1-5 wt% of para-toluensulfonic acid, and residual water. The organic light emitting display device can be manufactured with improved process efficiency by etching the metal films forming the gate electrode and a pixel electrode in a lump to represent superior etching characteristics.