| 摘要 |
A vertical cavity surface emitting laser (100) includes: a laminated body; an insulation layer (70) which is provided over at least a portion of the laminated body; an electrode (82) of which at least a portion is provided over the laminated body; a pad (84); and a wiring (86) which electrically connects the electrode and the pad, wherein the laminated body includes a first mirror layer (20), an active layer (30), and a second mirror layer (40), in a plan view, the laminated body (2) includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion, in the plan view, the electrode is provided so as to cover at least a portion of the resonance portion, in the plan view, a width of the wiring (86) is greater than a width of the first distortion imparting portion and is smaller than a width of the electrode (82). The non-circular shape of the mesa (2) and lateral oxidation of the mirror layers with high Al content (60,62) being part of the mesa (2) together with the non-circular shape of the resin layer results in a stress induced preferred polarisation of the VCSEL emission. |
