AIR MASS METER WITH A SENSOR ELEMENT

摘要

An air mass meter has a sensor element, across which an air mass flow to be measured moves. The sensor element is a micro-electro-mechanical system having a membrane, on which a heating element is formed. An electrical measuring resistor and at least two electrical comparison resistors are arranged upstream and downstream of the heating element. A first temperature sensor element is formed with a measuring resistor upstream of the heating element and two comparison resistors arranged downstream of the heating element. The second temperature sensor element is formed with a measuring resistor arranged downstream of the heating element and two comparison resistors arranged upstream of the heating element.