发明名称 VERTICLE BIPOLAR JUNCTION TRANSISTOR AND MANUFACTURING METHOD THEREOF
摘要 The present invention relates to a vertical bipolar junction transistor structure. The present invention includes an emitter terminal and a collector terminal which are a high density doping region formed on a semiconductor substrate, a base terminal which is a high density doping region formed between the emitter terminal and the collector terminal, a drift region which surrounds the emitter terminal, is deeper than the base terminal and the collector terminal, and has a first doping density, a base layer which is formed under the drift region, and a collector layer which is in contact with the base layer and has a second doping density which is higher than the first doping density. According to the present invention, costs for manufacturing the vertical bipolar junction transistor are reduced by using a BCD process with low costs, and a current gain is increased.
申请公布号 KR20150099666(A) 申请公布日期 2015.09.01
申请号 KR20140020851 申请日期 2014.02.21
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 HEBERT FRANCOIS;PANG, YON SUP;CHO, SEONG MIN;KIM, JU HO
分类号 H01L29/732;H01L21/328 主分类号 H01L29/732
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