| 发明名称 |
CLEANING SOLUTION FOR PELLICLE FRAME AND METHOD OF CLEANING PELLICLE FRAME USING THE SAME |
| 摘要 |
<p>The present invention provides a method for cleaning a pellicle frame. The method for cleaning a pellicle frame comprises: a step of using an alkali solution to clean the pellicle frame; a step of using a cleaning solution containing an oxidizer to clean the pellicle frame cleaned with the alkali solution; a step of rinsing the pellicle frame; and a step of drying the pellicle frame.</p> |
| 申请公布号 |
KR20150099675(A) |
申请公布日期 |
2015.09.01 |
| 申请号 |
KR20140040543 |
申请日期 |
2014.04.04 |
| 申请人 |
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS |
发明人 |
KIM, MIN SU;KIM, HYANG RAN;KIM, HYUN TAE;PARK, JIN GOO |
| 分类号 |
H01L21/302;G03F1/62;H01L21/027 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 地址 |
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