| 摘要 |
<p>The present invention relates to a substrate transfer apparatus for a chemical treatment transferring a substrate inside a chemical tank. The substrate transfer apparatus comprises: a first sprocket member connected to a driving motor to be rotated; a second sprocket member spaced from the first sprocket member, capable of rotating; a chain member of which both ends are respectively wound by the first sprocket member and the second sprocket member; and a plurality of substrate holder members installed in the chain member to be moved in a caterpillar track wherein the substrate is inserted to fixate the substrate holder members. The present invention continuously transfers the substrates in the caterpillar track to reduce time consumed to chemically treat the substrate to improve productivity, and efficiently transfers the substrate with a simple structure to significantly reduce installation costs and maintenance costs.</p> |
