发明名称 LIGHT MEASUREMENT APPARATUS, METHOD, PROGRAM AND RECORDING MEDIUM
摘要 A light measurement apparatus includes a master laser, a slave laser, an illumination light pulse, and a signal-under-measurement generator. The master laser generates as an output a master laser light pulse, and the slave laser generates as an output a slave laser light pulse having a repetition frequency or a phase different from that of the master laser light pulse. The illumination light pulse generator receives the master laser light pulse and generates as an output an illumination light pulse, and the signal-under-measurement generator, at a point in time when receiving a light pulse under measurement obtained by illuminating the object under measurement with the illumination light pulse and further the slave laser light pulse, generates as an output a signal under measurement according to a power of the light pulse under measurement. The apparatus corrects an error in a measurement of the signal under measurement.
申请公布号 US2015241346(A1) 申请公布日期 2015.08.27
申请号 US201314427061 申请日期 2013.08.22
申请人 ADVANTEST CORPORATION 发明人 Hashimoto Masaichi;Irisawa Akiyoshi
分类号 G01N21/59;G01J9/00 主分类号 G01N21/59
代理机构 代理人
主权项 1. A light measurement apparatus that corrects an error in a measurement of a signal under measurement, the apparatus comprising: a master laser that generates as an output a master laser light pulse; a slave laser that generates as an output a slave laser light pulse having a repetition frequency or a phase different from that of the master laser light pulse; an illumination light pulse generator that receives the master laser light pulse and generates as an output an illumination light pulse; and a signal-under-measurement generator that, at a point in time when receiving a light pulse under measurement obtained by illuminating the object under measurement with the illumination light pulse and further the slave laser light pulse, generates as an output the signal under measurement according to a power of the light pulse under measurement.
地址 Nerima-ku, Tokyo JP