| 主权项 |
1. A method of forming a wiring part of a flexure having a metal substrate, the metal substrate having a front end supporting a slider, the wiring part haying a base insulating layer and a conductor layer formed on the base insulating layer, the wiring part including a normal wiring part that is on the metal substrate, and an aerial wiring part that is on a space separated from the metal substrate, the base insulating layer of the aerial wiring part being formed to be thinner than that of the normal wiring part, the wiring part further including a terminal where each face of the conductor layer is exposed in a layer direction of the wiring part, the method comprising steps of:
forming the terminal by:
forming the base insulating layer on the metal substrate;forming a first recess in the base insulating layer on an opposite side opposing to the metal substrate;forming the conductor layer on the base insulating layer such that the conductor layer follows the opposite side of the base insulating layer;partly removing the metal substrate and forming a substrate opening corresponding to the first recess; andforming a second recess in the base insulating layer within the substrate opening from a metal substrate side up to the first recess; and forming the aerial wiring part simultaneously with the terminal by:
omitting one of forming a first recess and forming a second recess. |
