| 摘要 |
The present invention is capable of carrying out stable electrical discharge. A laser chamber for a discharge excitation-type gas laser device may be provided with the following: a first discharge electrode disposed inside the laser chamber; a second discharge electrode disposed inside the laser chamber so as to face the first discharge electrode; a fan for causing laser gas to flow between the first discharge electrode and the second discharge electrode; a first insulation member disposed on the upstream side and the downstream side of the laser gas flow at the first discharge electrode; a metal damper member disposed on the upstream side of the laser gas flow at the second discharge electrode; and a second insulation member disposed on the downstream side of the laser gas flow at the second discharge electrode. |
