CAPACITANCE TYPE SENSOR, ACOUSTIC SENSOR, AND MICROPHONE

摘要

A capacitance type sensor has a substrate, a vibration electrode plate formed over the substrate, a back plate formed over the substrate so as to cover the vibration electrode plate, and a fixed electrode plate provided on the back plate so as to be opposite to the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is separated into a plurality of regions, each of the plurality of regions being formed with a sensing section including the vibration electrode plate and the fixed electrode plate. A barrier electrode is provided between respective sensing sections of at least one adjacent pair of regions of the plurality of regions to prevent signal interference between the respective sensing sections.

主权项

1. A capacitance type sensor comprising:
a substrate; a vibration electrode plate formed over the substrate; a back plate formed over the substrate so as to cover the vibration electrode plate; and a fixed electrode plate provided on the back plate so as to be opposite to the vibration electrode plate, wherein at least one of the vibration electrode plate and the fixed electrode plate is separated into a plurality of regions, each of the plurality of regions being formed with a sensing section including the vibration electrode plate and the fixed electrode plate, and wherein a barrier electrode is provided between respective sensing sections of at least one adjacent pair of regions of the plurality of regions to prevent signal interference between the respective sensing sections.