COMPOSITIONS OF NEUTRAL LAYER FOR DIRECTED SELF ASSEMBLY BLOCK COPOLYMERS AND PROCESSES THEREOF
摘要
The present invention relates to novel neutral layer compositions and methods for using the neutral layer compositions for aligning microdomains of directed selfassembling block copolymers (BCP). The compositions and processes are useful for fabrication of electronic devices.
申请公布号
EP2758469(B1)
申请公布日期
2015.08.26
申请号
EP20120812330
申请日期
2012.09.21
申请人
MERCK PATENT GMBH
发明人
WU, HENGPENG;CAO, YI;HONG, SUNGEUN;YIN, JIAN;PAUNESCU, MARGARETA;NEISSER, MARK O.;LIN, GUANYANG