| 摘要 |
The loading density of canisters fitted to a supporting substrate of a storage enclosure is reduced. A plurality of rail structure bodies are provided in parallel with the Y-axis direction so as to be spaced apart by a first predetermined distance in the X-axis direction. A pair of the rail structure bodies arranged on left and right sides in the Y-axis direction support the canisters. The rail structure body includes first contact parts extended in parallel with the Y-axis direction, second contact parts formed continuously with the first contact parts so as to protrude by a second predetermined distance to one side in the X-axis direction, and coupling parts formed continuously with the first contact parts and the second contact parts. The canister is supported between one side surface of the second contact part of one rail structure body and the other side surface of the contact part. |
