发明名称 |
Directing a Beam of Electromagnetic Radiation into the end of an Optical Fibre Using Output from a Multiple Element Detector |
摘要 |
<p>System and methodology for setting, an compensating detected errors between intended an realized Angle-of-Incidence (AOI) an Plane-of-Incidence (POI) settings in ellipsometer an the like systems during analysis of sample characterizing data.</p> |
申请公布号 |
EP2111529(B1) |
申请公布日期 |
2015.08.26 |
申请号 |
EP20060817274 |
申请日期 |
2006.10.23 |
申请人 |
J.A. WOOLLAM CO. INC. |
发明人 |
GOEDEN, CHRIS;JOHS, BLAINE;LIPHARDT, MARTIN;PFEIFFER, GALEN |
分类号 |
G01B11/26;G01N21/21 |
主分类号 |
G01B11/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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