发明名称 三次元積層型半導体装置用の層間充填材組成物及びその塗布液
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an interlayer filling material composition satisfying the adaptability to a production process of a three-dimensional multi-layer semiconductor device, and having a high thermal conductivity. <P>SOLUTION: The interlayer filling material composition for three-dimensional multi-layer semiconductor device contains at least an epoxy resin (A) having an epoxy equivalent of≥2,500 g/eq. and an epoxy resin (B) having an epoxy equivalent of≤400 g/eq. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5768529(B2) 申请公布日期 2015.08.26
申请号 JP20110141159 申请日期 2011.06.24
申请人 发明人
分类号 C08L63/00;C08G59/22;C08K3/00;H01L21/52 主分类号 C08L63/00
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