发明名称 |
INTERCHANGEABLE MAGNET PACK |
摘要 |
A sputtering apparatus includes a template having cells. Removable inserts are disposed within the cells. The cells may be circular, triangular, square, diamond shaped, or hex shaped. The removable inserts may be magnetic or non-magnetic inserts. A cover is connected with a first side of the template. A yoke is connected with a second side of the template. The removable inserts are operable to customize or shape a magnetic field over a target. The yoke is operable to provide a return path for the magnetic field. |
申请公布号 |
EP2788524(A4) |
申请公布日期 |
2015.08.26 |
申请号 |
EP20120856309 |
申请日期 |
2012.12.07 |
申请人 |
SEAGATE TECHNOLOGY LLC;FOO, TOON HAI;NOLAN, THOMAS P.;KASSELA, WALTER STANLEY |
发明人 |
FOO, TOON HAI;KASSELA, WALTER STANLEY |
分类号 |
C23C14/35;C23C14/34;H01F7/02;H01J37/34 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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