Conductive film and semiconductor device

摘要

A conductive film of an embodiment includes: a fine catalytic metal particle as a junction and a graphene extending in a network form from the junction.

主权项

1. A semiconductor device comprising:
a substrate; an insulation film disposed on the substrate; and a conductive film disposed on the insulation film, wherein the conductive film contains a fine catalytic metal particle as a junction and a graphene extending in a network form from the junction, and the graphene in the conductive film is separated from the insulation film by a gap.