Magnetic sensor and sensitivity measuring method thereof

摘要

The present invention relates to a magnetic sensor with a sensitivity measuring function and a method thereof. Magnetic sensitivity surfaces detect flux density, and a switching unit extracts magnetic field intensity information of each axis, and inputs it to a sensitivity calculating unit. The sensitivity calculating unit calculates the sensitivity from the magnetic field intensity information about the individual axes from the magnetic sensitivity surfaces. The sensitivity calculating unit includes an axial component analyzing unit for analyzing the flux density from the magnetic sensitivity surfaces into magnetic components of the individual axes; a sensitivity decision unit for deciding the sensitivity by comparing the individual axial components of the magnetic field intensity from the axial component analyzing unit with a reference value; and a sensitivity correction unit for carrying out sensitivity correction in accordance with the sensitivity information from the sensitivity decision unit.

主权项

1. A magnetic sensor comprising:
a semiconductor substrate having a plurality of magnetic sensitive elements placed separately from each other; a magnetic substance having an edge which is near the plurality of magnetic sensitive elements; and a coil arranged between the plurality of magnetic sensitive elements, wherein the plurality of magnetic sensitive elements and the coil are placed on the same side with respect to the magnetic substance.