| 主权项 |
1. An interferometry system for monitoring changes in position of an object, the system comprising:
a. a spectrally broadband light source; b. at least one sensor module, each sensor module comprising an interferometer configured to receive light derived from the source, direct portions of the light along separate paths, and subsequently recombine the portions of light, wherein at least one of the paths contacts the object and wherein each sensor module further comprises a detector configured to measure the recombined light portions and produce a sensor output signal; c. at least one intensity monitor, each intensity monitor comprising a detector configured to measure an intensity of additional light derived from the source and produce a monitor output signal, wherein the intensity monitor is configured to characterize intensity fluctuations in a spectrally sensitive way, the intensity monitor comprises a first plurality of monitor cavities to sample a measurement range of the sensor module at a first plurality of known optical path difference (OPD) values; and d. an electronic processing module configured to receive the sensor output signal and the monitor output signal, process the sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object using a compensation determined based on measurements made by the first plurality of monitor cavities to yield a corrected distance measurement of the object, wherein the first plurality of monitor cavities each produces different interference phase values due to different OPD values. |
