| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing cloth in which a foreign matter is hard to be left in a recess provided in a polishing surface, and a method for manufacturing the polishing cloth.SOLUTION: A polishing cloth according to the present embodiment has a recess in a polishing surface thereof which contacts a polishing object, and a water-repellent and oil-repellent material is coated on at least a bottom surface of the recess. A method for manufacturing the polishing cloth according to the present embodiment is relevant to a method for manufacturing a polishing cloth having a recess in a polishing surface contacting a polishing object. According to the method, a water-repellent and oil-repellent material is coated on the whole of the polishing surface having the recess, and thereafter, the coating on a region of the polishing surface other than the recess is removed, whereby a polishing cloth, in which the water-repellent and oil-repellent material is coated on at least the bottom surface of the recess, can be manufactured. |
