RADIATION DETECTOR INCLUDING MIM STRUCTURE HAVING TEMPERATURE MEASUREMENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a new type of radiation detector that is selective for a wavelength to be detected, is optimized for a low-frequency noise and thermal time constant, and can be made of an extremely large number of materials.SOLUTION: The radiation detector includes, at least: a substrate; a film suspended on the substrate with a support element; an absorption element including at least one MIM structure formed of a lower metal element, an upper metal element, and a dielectric element disposed between the lower metal element and upper metal element; a temperature measurement element including at least one temperature measurement material. The film includes at least the upper metal element of the MIM structure and the temperature measurement material, and the temperature measurement material is a part of the dielectric element of the MIM structure.