GRINDING AND POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a grinding and polishing device which adjusts a chuck table at a desired tilt mutually between grinding and polishing.SOLUTION: A grinding and polishing device includes a chuck table 43 which rotatably holds a plate-like workpiece W and can move to a grinding area where grinding processing is performed and a polishing area where polishing processing is performed. When the chuck table is moved to the grinding area, the chuck table is tilted so that a surface of the plate-like workpiece and a grinding surface of grinding means 51 become parallel. When the chuck table is moved to the polishing area, the chuck table is tilted so that the surface of the plate-like workpiece is pressed at a uniform pressure by polishing means 71.