发明名称 METHODS AND SYSTEMS FOR STABILIZING FILAMENTS IN A CHEMICAL VAPOR DEPOSITION REACTOR
摘要 In various embodiments, systems, methods, and apparatus are provided for stabilizing filaments in a chemical vapor deposition (CVD) reactor system. A system includes a base plate having a plurality of electrical connections, a pair of filaments extending from the base plate, and a stabilizer connecting the pair of filaments. Each filament is in electrical contact with, and defines a conductive path between, the two electrical connections. A method of stabilizing the filaments includes providing the pair of filaments, and connecting the pair of filaments with at least one stabilizer. The stabilizer may include an electrically insulating material.
申请公布号 KR20150096447(A) 申请公布日期 2015.08.24
申请号 KR20157018101 申请日期 2013.12.19
申请人 GTAT CORPORATION 发明人 QIN WENJUN;FERO CHAD;RHODES AARON D.;GUM JEFFREY C.
分类号 C23C16/24;C01B33/035;C23C16/44 主分类号 C23C16/24
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