| 摘要 |
This electrical discharge inspection device (50), which inspects the electrical discharge of a wire bonding device that performs an electrical discharge when a voltage is imposed between a torch electrode (48) and a wire (42), is provided with: an electrical current detection unit (53) that detects the electrical discharge current flowing through the wire (42); a clock unit (56b) that measures the electrical discharge detection time from the imposition of the voltage until the detection of electrical discharge current; and an electrical discharge determination unit (57a) that determines whether or not the electrical discharge is abnormal on the basis of the electrical discharge detection time. As a result, provided are an electrical discharge inspection device, a wire bonding device, and an electrical discharge inspection method that are able to detect electrical current abnormalities. |
