| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of efficiently heating only a flow passage from the vicinity of outlets of screw groove exhaust flow passages to an exhaust port and suitable for preventing the deposition of a product caused by a decrease in temperature of process gas in the vicinity of the outlets of the screw groove exhaust flow passages and the flow passage.SOLUTION: A vacuum pump P1 comprises: a screw groove exhaust part Ps that comprises screw groove exhaust flow passages R1 and R2 in at least a portion on the inner peripheral side and the outer peripheral side of a rotor 6 (a rotating body); an outer case 1 that contains the screw groove exhaust part Ps; an exhaust port 3 that exhausts gas compressed by the screw groove exhaust part Ps to the outside of the outer case 1; and a partition wall 21 that covers a flow passage S from outlets of the screw groove flow exhaust passages R1 and R2 to the exhaust port 3. |
