发明名称 |
METHOD FOR MASS SPECTROMETRIC EXAMINATION OF GAS MIXTURES AND MASS SPECTROMETER THEREFOR |
摘要 |
A method includes parallel or serial ionization of a gas mixture by activating at least two ionization devices operating using different ionization procedures, and/or by ionizing the gas mixture in a detector to which the gas mixture and ions and/or metastable particles of an ionization gas are fed. The method also includes detecting the ionized gas mixture in the detector for the mass spectrometric examination thereof. A mass spectrometer for mass spectrometric examination of gas mixtures includes an ionization unit for ionizing a gas mixture and a detector for detecting the ionized gas mixture. |
申请公布号 |
US2015235829(A1) |
申请公布日期 |
2015.08.20 |
申请号 |
US201514658577 |
申请日期 |
2015.03.16 |
申请人 |
Carl Zeiss SMT GmbH ;Carl Zeiss Microscopy GmbH |
发明人 |
Chung Hin Yiu Anthony;Aliman Michel;Fedosenko Gennady;Ranck Albrecht |
分类号 |
H01J49/00;H01J49/10 |
主分类号 |
H01J49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Oberkochen DE |