MICRO-MACHINED ELECTRON MULTIPLIER FOR DETECTING IONISING PARTICLES, SYSTEM FOR DETECTING IONISING PARTICLES, AND METHOD FOR PRODUCING SAID DEVICE

摘要

The invention relates to a micro-machined and stackable electron multiplier (1) for detecting ionising particles, said device comprising: a solid substrate having a micro-machined central cavity (14) in the centre of the lower face of the substrate, defining a substrate-supporting peripheral contour (12) around the cavity, and having a plurality of micro-machined through-openings (13) arranged in communication with the cavity (14); a first dielectric insulating layer (17) deposited on all the surfaces of the solid substrate; a first polarising metallic electrode (15) arranged on the upper face of the first electric insulating layer (17); and a second polarising metallic electrode (16) arranged on the lower face of the first electric insulating layer (17).