IMAGE SEQUENCE, EVALUATION METHOD AND SYSTEM BY STRUCTURED ILLUMINATION MICROSCOPE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method and device that identify a height of a plurality of spatial positions by a structured illumination microscope method.SOLUTION: A method for identifying a height of a plurality of spatial positions is configured to: project a light beam having a sine wave spatial pattern orthogonal to an optical axis onto a surface; move the spatial pattern to a different spatial pattern position; scan the surface along the optical axis at a different scan position, in which a fixed relationship exists between a movement distance between continuous spatial positions and a scanning distance between continuous scan positions; detect light reflected upon the surface at the scan position, in which the spatial pattern has a corresponding spatial pattern position; identify an envelope curve of an intensity value corresponding to the scan position from light detected for each spatial position of the surface; and select a maximum value of the envelope curve representing a height of the spatial position of the surface, and a scan position corresponding to the maximum value. The spatial pattern is moved by a series of 2n steps (n>2) in a first spatial direction and in a second spatial direction over each of 1/4 pattern wavelength distance and 1/n pattern wavelength distance.