SILOXANE POLYMER COMPOSITIONS AND METHODS OF USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a siloxane polymer composition having properties suitable for use in negative tone lithographic fabrication processes.SOLUTION: A siloxane polymer composition comprises: a siloxane prepolymer with a backbone exhibiting a group which is capable of being deprotonated in an aqueous base solution and exhibiting reactive functional groups which are capable of reacting during a thermal or radiation initiated curing process; a photoreactive compound; and a solvent. The composition can be used in negative tone lithographic fabrication processes where a water based developer system is applied in a development process of a lithography production method.