PROCESSING METHOD AND PROCESSING APPARATUS

摘要

A method of processing an object to by using a processing apparatus is provided. The apparatus includes a plurality of containers to contain the object, a plurality of process chambers to perform a desired process on the object, a temporary storage chamber to temporarily store the object, and a transfer device to transfer the object. The method includes a first step of transferring an unprocessed object from the containers to the process chambers, and a second step of transferring a processed object from the process chambers to the temporary storage chamber. The method further includes a third step of collecting the processed object into one of the containers starting a collection of the processed object from the temporary storage chamber depending on a timing of processing a last object of the one of the containers prior to collecting the processed object into the other containers from the temporary storage chamber.

主权项

1. A method of processing an object to be processed by using a processing apparatus, the processing apparatus including,
a plurality of containers to contain the object; a plurality of process chambers configured to perform a desired process on the object therein; a temporary storage chamber to temporarily store the object therein; and a transfer device configured to transfer the object, the method comprising steps of: transferring an unprocessed object from the plurality of containers to the plurality of process chambers; transferring a processed object from the plurality of process chambers to the temporary storage chamber; and collecting the processed object into one of the plurality of containers starting a collection of the processed object from the temporary storage chamber in response to a timing of processing a last object of the one of the plurality of containers prior to collecting the processed object into the other containers from the temporary storage chamber and finishing the collection of the processed object into the one of the plurality of containers.