| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an infrared light source that achieves energy conservation.SOLUTION: An infrared light source 1 comprises: a reflective grating 3a; and a heating element 8 provided in a substrate 6 that faces the reflective grating 3a. The heating element 8 has an opening 14 in the center thereof in the planar view of the substrate 6. A substrate plane of the reflective grating 3a and a plane near the opening 14 of the substrate 6 are parallel to each other. The heating element 8 is a micro heater fabricated by micromachining technique.</p> |
