发明名称 SEMICONDUCTOR DEVICE AND IMAGING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that is highly integrated and has improved functions; and provide an imaging apparatus.SOLUTION: A semiconductor device according to an embodiment comprises: a substrate including a function element; and a thin-film transistor provided on the substrate. The thin-film transistor includes: an oxynitride semiconductor layer that includes a first portion, a second portion separated from the first portion, and a third portion provided between the first portion and the second portion; a first conductive layer that is electrically connected to the first portion; a second conductive layer that is electrically connected to the second portion; a gate electrode separated from the third portion; and a first insulation layer provided between the third portion and the gate electrode. The oxynitride semiconductor layer contains indium, gallium, zinc, and nitrogen. The content of nitrogen is 2 atomic % or less, and the content of gallium is greater than the content of nitrogen.
申请公布号 JP2015149414(A) 申请公布日期 2015.08.20
申请号 JP20140021752 申请日期 2014.02.06
申请人 TOSHIBA CORP 发明人 NAKANO SHINTARO;SAITO NOBUMI;MIURA KENTARO;MAEDA YUYA
分类号 H01L21/336;H01L21/28;H01L21/314;H01L21/768;H01L23/522;H01L27/14;H01L29/417;H01L29/423;H01L29/49;H01L29/786 主分类号 H01L21/336
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