METHOD FOR MANUFACTURING NANO-IMPRINT MOLD, METHOD FOR MANUFACTURING LIGHT EMITTING DIODE USING THE NANO-IMPRINT MOLD AND LIGHT EMITTING DIODE BY THE METHOD

摘要

The present invention relates to a manufacturing method of a nanoimprint mold using a metal substrate. The manufacturing method of the nanoimprint mold according to the present invention comprises: a step of forming a polymer film on the metal substrate and heating the same; a step of pressurizing the polymer film with an imprint mold wherein a pattern is formed and transferring the pattern to the polymer film; a step of removing the imprint mold; and a step of cooling the metal substrate and the polymer film. The size of the pattern which is formed by controlling a thermal expansion coefficient and a heating temperature of the metal substrate is controlled.