发明名称 |
POLYCRYSTALLINE THIN FILM AND METHOD FOR PRODUCING THE SAME |
摘要 |
<p>An object of the invention is to provide a polycrystalline thin film which includes an intermediate layer that is made thinner while keeping high crystal orientation so as to prevent warpage of a substrate resulting from internal stress of the film. A polycrystalline thin film according to the invention includes an intermediate layer formed by a first layer and a second layer laminated in this order and provided on a metal substrate. The first layer has a rock-salt crystal structure and the second layer has a fluorite crystal structure.</p> |
申请公布号 |
EP2138611(B1) |
申请公布日期 |
2015.08.19 |
申请号 |
EP20080739278 |
申请日期 |
2008.03.28 |
申请人 |
FUJIKURA LTD. |
发明人 |
IIJIMA, YASUHIRO;HANYU, SATORU |
分类号 |
C30B29/22;C23C14/02;C23C14/08;C30B23/02;C30B29/16;H01B12/06;H01L39/24 |
主分类号 |
C30B29/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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