| 摘要 |
The present invention relates to a method of and device for extracting XUV and/or soft X-ray radiation from a chamber (3) filled with a liquid to vacuum. The method of the present invention uses explosion of a metal wire (2) disposed vacuum-tight within a dielectric plug (4) and connected in the chamber (3) to a high-voltage electrode (1) a in an evacuated space (8) to an earth electrode (7). The chamber (3) and the evacuated space (8) are separated from each other by a parting wall (5) with the dielectric plug (4) mounted in vacuum-tight manner therein. After application of a high-voltage pulse to the high-voltage electrode (1), electric current flowing between the high-voltage electrode (1) and the earth electrode causes melting of the wire (2), which evaporates and ionizes creating thus a channel filled with a hot, dense plasma generating intense XUV and/or soft X-ray radiation propagating in the evacuated space (8). After termination of the current pulse, the channel with liquid walls like in the chamber (3) filled with liquid, ceases to exist, the melt of the walls of the opening in the dielectric plug (4) closes said opening and cools down separating thus again vacuum-tight the chamber (3) filled with liquid from the evacuated space (8). |
