发明名称 Integrated circuit devices and fabrication techniques
摘要 Integrated circuit devices and fabrication techniques. A semiconductor device fabrication method may include doping, in a same processing step, first and second portions of a substrate of an integrated circuit. The first portion corresponds to a doped region of a semiconductor device. The second portion corresponds to a via contact. The method may further include, after the doping, forming the gate of the semiconductor device.
申请公布号 US9111801(B2) 申请公布日期 2015.08.18
申请号 US201313856985 申请日期 2013.04.04
申请人 STMicroelectronics, Inc. 发明人 Zhang John H.
分类号 H01L21/04;H01L27/12;H01L29/66;H01L21/84;H01L27/11 主分类号 H01L21/04
代理机构 Seed IP Law Group PLLC 代理人 Seed IP Law Group PLLC
主权项 1. A method, comprising: doping, in a same processing step, first and second portions of a substrate of an integrated circuit, the first portion corresponding to a doped region of a semiconductor device, and the second portion corresponding to a via contact; and after the doping, forming the gate of the semiconductor device; and after the doping, isolating the first portion of the substrate from a third portion of the substrate corresponding to a doped region of a second semiconductor device.
地址 Coppell TX US