Interferometer and fourier-transform spectroscopic analyzer

摘要

An interferometer (1) measures a measuring interference beam, while detecting the position of a moving mirror (16) on the basis of detection results obtained from a reference beam detector (25). In the interferometer, a reference beam source (21) is configured by including a light source (21a) composed of a semiconductor laser device. A reference optical system (20) has a collimating optical system (22) for a reference beam, said collimating optical system converting a laser beam outputted from the reference beam source (21) into a collimated beam, and the collimated beam is diagonally inputted to a fixed mirror (15).

主权项

1. An interferometer, comprising:
a measurement optical system in which measurement light from a measurement light source is split by a beam splitter into light beams, which are guided to a movable mirror and to a stationary mirror, respectively, and the light beam reflected off the movable mirror and the light beam reflected off the stationary mirror are combined by the beam splitter into measurement interference light, which is guided to a measurement light photodetector; and a reference optical system in which reference light from a reference light source is split by the beam splitter into light beams, which are guided to the movable mirror and to the stationary mirror, respectively, and the light beam reflected off the movable mirror and the light beam reflected off the stationary mirror are combined by the beam splitter into reference interference light, which is guided to a reference light photodetector, the interferometer performing measurement of the measurement interference light while, based on a detection result of the reference light photodetector, detecting a position of the movable mirror, wherein
the reference light source is constituted by a semiconductor laser or a laser light source that outputs laser light emitted from the semiconductor laser via a waveguide or a fiber,the reference optical system has a collimator optical system for reference light that converts laser light emitted from the reference light source into collimated light, andthe collimated light becomes obliquely incident on the stationary mirror such that an optical path of the measurement light and an optical path of the reference light are not perfectly coaxial with each other.