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发明名称
一种调焦调平装置
摘要
一种调焦调平装置,包括:用于发出一光束的照明光源,以及沿上述光束的一传输路径依次排列的照明镜组、投影镜组、被测物体、探测镜组、折光单元、中继镜组及光电探测器;上述投影镜组包括一投影狭缝,上述投影狭缝上具有多个不处于同一直线的标记,使得照明光源发出的光束依次经过照明镜组、投影镜组、被测物体及探测镜组后生成与上述多个标记对应的多个不处于同一直线的子光束,上述折光单元被配置为使得上述多个子光束经上述折光单元后生成处于同一直线上的多个光斑。
申请公布号
TW201531820
申请公布日期
2015.08.16
申请号
TW103146044
申请日期
2014.12.29
申请人
上海微电子装备有限公司
发明人
宋海军;陆侃;陈飞彪
分类号
G03F9/00(2006.01)
主分类号
G03F9/00(2006.01)
代理机构
代理人
赖经臣宿希成
主权项
地址
中国大陆 CN
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