| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting a component having an uneven surface with an ultrasonic wave.SOLUTION: An inspection method (a) immerses a component in liquid, gives fluid coupling with thickness of several ultrasonic wavelengths between an ultrasonic probe consisting of an array body of a large number of small ultrasonic elements respectively having an ultrasonic beam spread and a component having an uneven surface, (b) scans the component with the ultrasonic beam while actuating the respective ultrasonic elements one by one, (c) stores an ultrasonic waveform emitted from the individual ultrasonic element in the array body for each actuation and reflected on the surface of the component and an ultrasonic waveform reflected on an internal reflection object of the component, measures the surface shape by sweeping the arrangement of the ultrasonic waveform data, calculates a signal processing parameter as a function of the position of the ultrasonic probe on the basis of the surface shape, and (d) performs correction with respect to the irregularity of the surface of the processed component by processing the data array using the signal processing parameter and calculates the inspection result of the reflection object inside the component. |
