发明名称 APPARATUS AND METHOD FOR PHYSICAL STATE MEASUREMENT
摘要 PROBLEM TO BE SOLVED: To provide an apparatus and a method for measuring a physical state of a measurement object at high speed.SOLUTION: A physical state measurement device 100 includes: a light source 110; a splitter 120 for splitting light from the light source 110 into measurement light and reference light; transmission means for transmitting the measurement light to a measurement point of a measurement object; reference light reflection means 130 for reflecting the reference light; optical path length change means 140 for changing the optical path length of the reference light reflected from the reference light reflection means 130; wavelength conversion means 150 for wavelength converting the measurement light, reflected at the measurement point, and the reference light reflected at the reflection means 130; light receiving means 161 for receiving the measurement light and the reference light after the wavelength conversion; and measurement means 162 for measuring the physical state at the measurement point on the basis of the interference waveforms between the measurement light and the reference light received by the light receiving means 161.
申请公布号 JP2015146432(A) 申请公布日期 2015.08.13
申请号 JP20150042688 申请日期 2015.03.04
申请人 TOKYO ELECTRON LTD 发明人 YAMAWAKI JUN;KOSHIMIZU CHISHIO;MATSUDO TATSUO;NAGAI KENJI
分类号 H01L21/66;G01K5/52;G01K11/12 主分类号 H01L21/66
代理机构 代理人
主权项
地址